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Thin films of technologically important chromium nitride, prepared using ion beam-assisted deposition (IBAD) on stainless steel, have been characterized for their composition and thickness by backscattering spectrometry and glow discharge mass spectrometry (GDMS). The composition of the films was determined by non-resonant 14 N(p,p) 14 N backscattering using 1.6-1.73 MeV...
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