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The design of piezoelectrically actuated plano-convex shaped resonators in lanthanum gallium silicate (langasite, LGS) was investigated and improved by finite element simulations. Especially effects of shape and clamping were simulated. Further, devices that demonstrate the working principle have been fabricated. The membrane arrays have shown operating temperatures of more than 700degC and are applied...
Piezoelectrically actuated plano-convex thickness shear mode (TSM) resonators in lanthanum gallium silicate (langasite, LGS) were fabricated. As main fabrication steps a wet etching process and a dry etching process were developed and furthermore graytone-lithography in combination with photoresist melting has been applied. The plano-convex shape is necessary to improve the Q- factor of the devices...
Piezoelectrically actuated plano-convex thickness shear mode (TSM) resonators in lanthanum gallium silicate (langasite) were fabricated. As main fabrication steps a wet etching process and a dry etching process were developed and furthermore graytone-lithography in combination with photoresist melting has been applied. The plano-convex shape is necessary to improve the Q-factor of the devices. The...
Piezoelectrically actuated membranes in lanthanum gallium silicate (langasite) were fabricated. The membranes have shown operating temperatures up to 850 degC and are applied as high temperature gas detecting devices by means of CeO2 sensor films. The measurements show, that gas sensing with membranes is feasible and results in even higher frequency shifts as for thick plan-parallel resonators. A...
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