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High-quality ZnO:Al films were deposited on glass substrates at a relatively low temperature of 300°C by ultrasonic spray pyrolysis. Zn(acac) 2 and Al(acac) 3 acted as zinc and aluminum source, which dissolved in ethanol–water solution. The influences of aluminum concentration and vacuum annealing on microstructure, electrical and optical properties were investigated by XRD, SEM, EDS,...
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