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A novel Love-wave sensor based on multi-guiding layers, SiO2 layer and indium tin oxide (ITO) nanoparticle layer, was developed. The ITO nanoparticles worked as guiding and sensitive layers at the same time. The interaction between ITO nanoparticles and toluene molecules produced changes in elastic properties of nanoparticles and consequently the sensor suffered a proportional frequency shift for...
The piezoelectric characteristics of ZnO films obtained by RF magnetron sputtering in reactive plasma have been researched. ZnO films have been grown on SiO/sub 2//Si (100) substrate using a zinc oxide target. Different RF power and reactive plasma have been tested to obtain a good piezoelectric material for SAW applications. Crystalline structures and morphological characteristics of the films were...
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