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We report on the behavior and effect of the residual layer left on the substrate after embossing process for the fabrication of photonic devices. The PDMS material was used as mold, and thermal and UV curable polymers was adapted for the fabrication of demultiplexer and optical power splitter, respectively.
We have designed and fabricated a novel type of polymer based optical bench for vertical-cavity- surface-emitting-laser (VCSEL) array by UV embossing technique. The polymer based optical bench consists of twelve-channel-rectangular grooves as fiber guiding structures and a 45deg-groove as a 90deg-out- of-plane light reflection mirror to guide the light from VCSEL to a multimode fiber (MMF).
We report on UV embossing process for realizing an optical power splitter using a UV curable polymer material. The polydimethylsiloxane (PDMS) mold transferred from the master was used for forming the micro-scale structure and patterning repeatedly it. We experimented also on the durability of the PDMS mold in casting a UV curable polymer. Residual layer thickness on the replica was observed to be...
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