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A stress isolation guard-ring to reduce the unwanted signals induced by the environmental disturbances for a packaged three-axis piezoresistive accelerometer is proposed [1–2]. This study further reports an optimum design to shrink the size of guard-ring, yet maintain the performance of accelerometer. The commercial finite element analysis (FEA) software, CoventorWare, is employed to evaluate the...
This study reports a systematic approach to achieve optimal design of a piezoresistive sensor under the limitation of fabrication capabilities. The commercial finite element analysis (FEA) software, CoventorWare, is employed to evaluate the candidate designs of a piezoresistive pressure sensor. The Taguchi's robust design method is further employed to consider the deviation from manufacturing (e.g...
This paper presents the design and fabrication of a single-layer out-of-plane thermal actuator. The step-bridge structure design enables bending and then buckling of the actuator in the out-of-plane direction by Joule heating. Moreover, the moving direction of the actuator can be specified by the step structure. In summary, the step-bridge actuator design has the following five merits: (1) The load-deflection...
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