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A flexible, highly-sensitive, and easily fabricated carbon nanotubes (CNTs) tactile sensor is reported in this paper. CNTs are grown and patterned on bulk-micromachined silicon substrate with 3-dimensional surface profile. After polymer molding, the CNTs with 3-dimensional distribution are successfully transferred onto a flexible PDMS with 3-dimensional tactile-bump. Advantages of presented tactile...
This study reports a simple approach to implement a flexible CNTs tactile sensor to enable the detecting of normal and shear forces. The merits of the presented tactile sensors are as follows, (1) embedded patterned CNTs into polymer using simple Si-substrate molding process, (2) 3D distributed CNTs enable the detection of shear and normal forces, and (3) 3D polymer structure by molding as a tactile-bump...
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