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Au deposited SU-8 microdots comprised SU-8-PET microchip using low temperature polymer bonding technology is developed. A fine microdot array (1µm×1µm×0.5µm dots with 2µm pitch in area of 50µm×5mm) is fabricated by electron beam lithography (EBL) using SU-8 as a negative tone resist. A microchannel structure is formed with UV patterned SU-8 on a glass substrate. The SU-8 structure is sealed with a...
This research studies on VUV/O3-treated aromatic polyurea film from near-edge X-ray absorption fine structure (NEXAFS) and X-ray photoelectron spectroscopy (XPS) spectra. These spectra indicate that the benzene ring was cleaved after the treatment, and carboxyl and hydroxyl groups were formed at the cleaved sites. The VUV/O3-treated polyurea was applied to polymethylmethacrylate (PMMA) microchip for...
Integrated electrophoresis-mass spectrometry polymer devices were fabricated. The electrospray ionization (ESI) emitter tip structure was formed directly at the microchip electrophoresis (MCE) outlet. Since these devices enable negligible dead volume at the electrospray port, efficient spray of the sample necessary for high resolution mass spectrometry (MS) was realized. Stable spray was also achieved...
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