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The SnO 2 content dependence of the sensitivity of sputtered SnO 2 -doped ZnO thin film chemical sensor is studied for various gases. It is found that the SnO 2 (78 wt%)-doped ZnO thin film chemical sensor exhibits a high sensitivity and good selectivity for C 2 H 5 OH gas. The sensitivity of the SnO 2 (78 wt%)-doped ZnO thin film chemical sensor responds...
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