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Designing and fabrication of 4kV, 20A 4H-SiC PiN diodes with JTE junction termination structure have been investigated in this paper. A bevel mesa structure and a single-zone junction termination extension (JTE) have been employed to achieve the target voltage. Finally, an optimized mesa structure without sub-trench (mesa height of 2.2 µm and mesa angle of 20°) has been experimentally demonstrated...
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