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Silicon nanocrystals (Si-NCs) in silicon carbide (SiC) matrix fabricated by rapid thermal annealing were characterized using grazing incidence X-ray diffraction and transmission electron microscopy. Two structures of Si-NCs were found in the thin films. Si-NCs in the surface layer had face-centered cubic (fcc) structure, whereas those in the inner layer had cubic diamond (cd) structure. The thermodynamics...
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