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Molecular dynamics (MD) methods using Tersoff potential are employed to study the nanomechanical behaviors of 3C-SiC (010) thin films under [100]-oriented tension. In this work, the Young’s modulus, tensile strength and elongation of thin films are compared with those of the bulk 3C-SiC for different temperatures. The results show that Young’s modulus of the nanofilms is size dependent and softer...
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