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Chemical vapor deposition of MnOx (CVD-MnOx) was performed on blanket substrates as well as patterned interconnect structures. A conformal layer of MnOx was formed by the MnOx on SiO2 within a contact hole with a uniform thickness of 3 to 4 nm. Excellent diffusion barrier property was obtained after annealing at 400 degC. In contrast, the CVD-MnOx on Cu formed solid solution with Cu. The solute Mn...
Decomposition characteristics of acetone in an atmospheric DC corona discharge are investigated for the different gas composition of a background gas, nitrogen-oxygen mixture. CO2, CO, CH4, HCHO, HCOOH and HCN are products from acetone, and CO2 is a major and end-product. CO, CH4, HCHO, HCOOH and HCN are intermediate products, the concentrations of which depend on that of oxygen. Decomposition rate...
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