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The growth defects in magnetron sputtered coatings have been well studied in industrial environment. In this work, on the other hand, the emphasis is in observing the same phenomena in a lab-scale UHV environment. TiN and CrN films were deposited at a thickness of 1–2 μm. The statistical evaluation of defect density was based on stylus profilometry scans (2 mm2 area), and consequent analysis of hillock...
We studied the oxidation resistance of CrVN single-layer, CrN/(Cr,V)N nanolayer and CrN/(Cr,V)N/VN nanolayer hard coatings with respect to the Cr:V atomic ratio. All the coatings were deposited by DC magnetron sputtering in an industrial deposition system. Using different target configurations we were able to prepare a series of samples with various Cr:V ratios. The following target arrangements were...
Camera obscura or pinhole camera is an optical device where object is recorded through a small pinhole. A similar experiment was performed in a sputter deposition system. A shield with small aperture (1mm in diameter) was positioned between the target and the glass substrate. Only the material sputtered in direction of the aperture was deposited on the substrate. In this way a direct image of the...
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