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We demonstrate a stacked complementary metal-oxide semiconductor (CMOS) image sensor overlaid with a chlorine (Cl)-doped crystalline selenium (c-Se) photoconversion layer. The size of the polycrystalline particles (grains) of c-Se, which is strongly related to dark current pattern noise, is controlled by Cl doping to c-Se; hence, the resulting device provides clear images. Furthermore, avalanche multiplication...
We fabricated stack layer transparent conductive IGZO thin films for TFT device applications using a sol-gel method. This research focuses on the properties of the resulting thin films to evaluate the ability of solution methods to replace current ultra-high vacuum techniques to fabricate thin films and its used devices. In this paper, we describe our high quality solution deposited technique: developing...
Pore in low-k SiOCH and vacancies in electroplated Cu buried in damascene structures were studied using monoenergetic positron beams. Doppler broadening spectra of the annihilation radiation and lifetime spectra of positrons were measured for the samples through Cu/low-k damascene processes. The mean pore size in SiOCH decreased after contact etching, but kept constant during Cu metallization. The...
Pore characteristics of SiOCH layers in fine-pitch Cu-damascene interconnects were studied using monoenergetic positron beams. Doppler broadening spectra of the annihilation radiation and lifetime spectra of positrons were measured for the samples fabricated with the line/space widths of 0.27/0.27 and 1.08/1.08 mum, respectively. From measurements of the positronium (Ps) lifetimes, the mean pore size...
We performed detailed analysis of Ni silicide discontinuities induced by agglomeration that causes the increasing electric resistance in high-performance CMOS devices by using advanced physical analysis techniques. We confirmed that the agglomeration of the Ni silicide is related to elongated-triangular- shaped-splits - which we call delta-shaped-splits-which cause discontinuities that occur at small-angle...
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