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CrAlSiN/W2N multilayer coatings are fabricated periodically by DC magnetron sputtering. Crystal phases and preferred orientations of thin films are characterized by an X-ray diffractometer. The microstructure of multilayer coatings is examined by scanning electron microscopy (SEM) and transmission electron microscopy (TEM), respectively. Through high-resolution and dark-field TEM images, superlattice...
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