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Effects of the thickness of CdCl 2 layer and the annealing on structural and optical properties of sputter-deposited CdS films were investigated. The annealing process of evaporated CdCl 2 was carried out by heating the sample in air at 350–500 °C for 20 min. As the thickness of the CdCl 2 increases, the (002) peak of CdS becomes weak and the other peaks of CdS increases. Especially,...
Direct liquid injection (DLI) of Ru(tmhd) 3 (tmhd=2,2,6,6-tetramethylheptane-3,5-dione) in n-butylacetate solvent was used to deposit ruthenium oxide and ruthenium thin films in the temperature range of 250-450 o C. Arrhenius plot showed that the mass transfer of the reactant determined the deposition rate at high temperature and it was determined by the surface reaction at lower temperature...
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