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Lithium aluminosilicate substrates with β-eucryptite phase are synthesized by solid-state sintering. Doping with TiO 2 improves the density, strength, hardness, and coefficient of thermal expansion (CTE); however, the negative CTE becomes less after 3wt.% is exceeded.
A method for making ZrW 2 O 8 ceramic substrates is described. ZrW 2 O 8 ceramic substrates are formed by sintering for 6 h between 1155 and 1200 o C. The variation of the thermal expansion coefficient with the location and the mechanical properties can both be improved by the appropriate heat treatment. The thermal expansion coefficient, Young's modulus, and...
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