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A novel temporary bonding and debonding using polypropylene carbonate (PPC)-based bilayer has been proposed and investigated in this paper for the first time. Photo acid generator (PAG) and copper nanopowder are investigated as PPC loadings. For bilayer bonding structure, the highest average shear strength is 3.8MPa, which is much higher than that of PAG-PPC bonding. During the debonding process,...
This paper carried out extensive research about temporary bonding/debonding schemes based on propylene carbonate (PPC). The temporary bonding was investigated at different bonding temperatures and bonding time. The bonding pressure is 0.2 MPa. The highest shear strength of 4.1 MPa is achieved at bonding temperature of 150°C and bonding time of 20 min. The bonded wafers were debonded using thermal...
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