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In this paper, we introduce a single-axis resonant combdrive microelectromechanical systems (MEMS) scanner with a large-area highly reflective broadband monolithic single-crystal-silicon (SCS) photonic crystal (PC) mirror. PC mirrors can be made from a single monolithic piece of silicon through alternate steps of etching and oxidation. This process allows the fabrication of a stress-free PC reflector...
In this paper we introduce a MEMS scanner with a highly reflective broadband photonic crystal mirror. These mirrors achieve higher reflectivity than metal reflectors and can tolerate higher processing temperatures. Photonic crystal mirrors can be made of a single dielectric material and hence are much simpler to fabricate than multi-layer dielectric stacks. Our photonic crystal mirror shows broadband...
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