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In order to study the effects of anode layer linear ion source(ALLIS)on the microstructure and mechanical properties of amorphous carbon nitride (a-CNx) films, a-CNx films were deposited by the ALLIS assisted radio frequency magnetron sputtering (RFMS) deposition condition changing the ion source power from 0 to 200W. The growth rate, structural morphology, surface roughness, nanohardness as well...
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