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In this paper, we fabricate a pure-shear mode film bulk acoustic resonator based on c-axis oriented ZnO film. The resonator is consisted of an in-plane electrode, a highly c-axis oriented ZnO film and a SiO 2 /W Bragg reflector. The shear mode wave is excited by the lateral electric field. The resonator works in a pure-shear mode with the resonance frequency near 1.5GHz and the Q-factor of...
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