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We have investigated the improvement of the corrosion resistance of metal products using a SiCN coating deposited by hot-wire chemical vapor deposition (HWCVD). We used brass as a metal product. SiCN coated brass was immersed in a 10% sulfuric acid solution for one week as a corrosion resistance test. It was found that the corrosion resistance of the brass was improved by the SiCN coating. Moreover,...
SiCN films were obtained at a substrate temperature of 250 °C by hot wire chemical vapor deposition (HWCVD) using hexamethyldisilazane which is non-explosion organic liquid source instead of SiH 4 . The SiCN films were immersed into 10% H 2 SO 4 for 1 week to investigate a corrosion resistance of SiCN films. The film thicknesses of these samples were measured by ellipsometry...
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