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We have developed a high-resolution, laser-based system capable of real-time angular deflection measurement and have used it to characterize non-invasively micromechanical actuators with reflective surfaces. The angular resolution of this system is better than 0.0005° and the measurement bandwidth is 100 kHz. The linear range can be as high as ± 1.5° from any bias angle up to ± 30°. Steady-state deflection...
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