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We demonstrate nanoelectromechanical contact-mode switches and logic gates with high performance, enabled by cantilever-structured SiC nanoelectromechanical systems (NEMS). In full-cycle recording measurements (complete time-domain trace of every single switching cycle recorded), we show that in ambient air, SiC NEMS switches with nanocontacts have operated >1×107 cycles of ‘hot-switching’ without...
We present demonstration and experimental results of four-terminal nanoscale electromechanical switches with a novel dual-gate design in a lateral configuration based on polycrystalline silicon carbide (poly-SiC) nanocantilevers. The switches operate at both room temperature and high temperature up to T≈500°C in ambient air with enhanced control over the distributed electrostatic actuation force,...
We report experimental demonstration of nanoscale electromechanical contact-mode switches with clearly high comparative performance, enabled by polycrystalline silicon carbide (poly-SiC) nanomechanical cantilevers, in a three-terminal, gate-controlled, lateral configuration. We have recorded the complete time evolution of the measured switching events in ambient air, by switching devices on and off...
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