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To improve the productivity of very large scale of LSIs or large LCD panels, the nano-level measurement to inspect the LSIs is required. To meet with these requirements, a nano-level 3D shape extraction method has been introduced and the measurement results are described. To extract a nano-level 3D shape, the method using laser interference images is effective. Interference image is produced by light...
To improve the productivity of very large scale of TSIs or large LCD panels, the nano-technologies to inspect the TSIs are required. To remove the less than one-micrometer contaminants on the TSIs, it is required to extract their positions and 3-D shapes, precisely. To meet with these requirements, a nano-level 3-D shape extraction method has been introduced and the measurement results are described...
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