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Alternately Er-doped Si-rich Al 2 O 3 multilayer film, which consists of 20 layers of alternate Er–Si-codoped Al 2 O 3 and Si-doped Al 2 O 3 layers, has been synthesized by magnetron cosputtering. The structural and optical properties of the multilayer film as a function of annealing temperature in the range of 700–1100°C were studied by Raman, X-ray...
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