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The constituent phases, electrical conductivity, and Seebeck coefficient of Ca-Si films deposited on (001) Al2O3 substrates by a radio frequency magnetron sputtering method using a Mg disk target with Ca and Si chips are investigated. X-ray diffraction analysis indicates that the films consist of a single phase of CaSi2, CaSi or Ca5Si3 that are deposited together with the films consisting of a mixture...
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