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We have studied the lateral coalescence in microchannel epitaxy (MCE) of InP by LPE. In the present study, we suggest that there are two modes of the coalescence, “one-zipper” and “two-zipper”. New patterns of microchannels were designed to realize these two coalescence modes. The coalesced MCE islands were chemically etched and it was found that dislocations were usually generated in the coalesced...
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