The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
An aluminum-nitride (AlN) based energy-harvesting MEMS sensor is developed. We aimed at realizing energy-harvesting sensor with functional feature of wide-band response at low-frequency vibration domain, owing to the high-power density of vibration sources energy in a particular low frequency with several Hz deviations. By simplifying and analyzing the vibration module of the sensor structure, a special...
The differential pressure sensors are used for various applications. In this work, a piezoelectric differential pressure sensor using an aluminum nitride (AlN) thin film cantilever is proposed to achieve high sensitivity and low power consumption. The dimensions of the cantilever are 1500 µm × 1000 µm × 2 µm. The proposed sensor needs no power consumption in the AlN sensing element in principle. The...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.