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This paper presents a two-axis electrothermal single-crystal-silicon micromirror that is tilted 45° out of plane on a silicon optical bench (SiOB). The SiOB provides mechanical support and electrical wiring to the tilted two-axis scanning mirror, as well as aligned trenches for assembling other optical components, such as optical fibers and GRIN lens. The pre-set tilting of the mirror plate is achieved...
A two-axis scanning MEMS based forward-viewing endoscopic imaging probe has been developed and successfully applied in a swept source OCT system for three-dimensional imaging. The 2-axis MEMS mirror has an aperture size of 0.85 mm by 0.85 mm and a chip size of 1.5 mm by 1.7 mm and the outer diameter of the probe is 5.0 mm. The MEMS mirror achieves large optical scan angle up to 30° at 3 V. The MEMS...
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