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In this paper we report a wide-angle two-axis electrothermal MEMS scanning mirror and its application in optical coherence tomography (OCT). The wide-angle scanning was achieved by combining the large scan range of the MEMS mirror and the “Snell's Window” effect. By immersing the electrothermal MEMS mirror into a mineral oil, the original 32° field of view (FOV) can be increased up to about 75°. The...
This paper reports an electrothermal MEMS scanning mirror working in liquid for the first time. By submerging the MEMS mirror into a mineral oil whose refractive index is 1.47, a wide-angle optical scan (>120°) was achieved at small driving voltage (<10V), and the scan frequency reached up to 30 Hz. The wide angle was achieved because of the angular increase of the “Snell's Window” effect and...
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