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By providing a permanent electric polarization, electrets have a wide range of applications in different fields like sensors and actuators, energy harvesting or biomedicine. Stable electrets with silicon-based compatible technology are particularly pursued. In this work, different dielectric layer stacks, including SiO2, Si3N4, AL2O3 and AlN, are evaluated in terms of charge storage and retention...
Atomic layer deposition of high-k dielectrics is currently identified to be an enabling technology for a variety of applications. An overview of the characteristics of the technique is presented and its limiting factors and opportunities discussed. Particular attention is paid to Al2O3 and HfO2 films deposited on silicon in terms of material and electrical characteristics for their use in MEMS and...
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