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A Pt film temperature sensor was prepared on the alumina substrate using a microelectromechanical system (MEMS) micromachining process. The Pt sensitive element had a width of 10μm and a thickness of 200nm. The resistance–temperature dependence was studied in the range of 25–900°C. The effect of the annealing temperature on the initial resistivity and temperature coefficient of resistance (TCR) of...
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