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Diamond has the highest sound velocity among all materials and has been applied in high frequency surface acoustic wave (SAW) devices in the gigahertz range. To date, numerous researches have reported that the SAW devices built on a diamond wafer can work in the frequency range from 2 GHz to 10 GHz. S. Fujii et al. reported that the one-port resonator with an interdigital transducer (IDT)/AlN/single...
Diamond is known to have the highest sound velocity of all materials, and therefore, has been applied to high frequency surface acoustic wave (SAW) devices in the gigahertz range. Our earlier research has shown much potential for diamond SAW resonators and filters on single crystal substrates at frequencies above 3 GHz. However, single crystal diamond wafers of only up to two-inch in diameter have...
Diamond has the highest known surface acoustic wave (SAW) phase velocity, sufficient for applications in the gigahertz range. In addition, diamond can be synthesized from methane gas by chemical vapor deposition (CVD) and is also free from rare earth and rare metal materials. Although numerous studies have demonstrated SAW devices on polycrystalline diamond thin films, all of these devices have a...
This paper gives an overview of recent progress in developing diamond surface acoustic wave (SAW) devices for high‐frequency applications. We have studied high‐frequency SAW filters or resonators based on diamond thin films and demonstrated that diamond thin films have much potential for SAW applications above 3 GHz. Diamond film characteristics required for SAW filters in high‐frequency applications...
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