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Polymerization by‐products with the formula (SiCl2)n or SinHxCl2n–x are accumulated at the reactor exhaust of SiC chemical vapor infiltration (CVI) from CH3SiCl3/H2, which occur as an explosive hazard. Thermodynamic constants of the chlorinated silane polymers (SiCl2)n and Cl(SiCl2)mCl (n ≤ 5, m ≤ 4) were obtained by quantum chemical calculations using the CBS‐QB3 method. Polymerization reaction pathways...
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