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This work presents analysis and test results on temperature-dependence improvement for a microelectromechanical systems (MEMS) gyroscope based on triangular-electrode based (TEB) capacitive detection method. To reduce the effects of temperature variations on MEMS gyroscopes, TEB capacitive detection method is applied because the extracted amplitude and phase are robust to system parameter fluctuations...
This paper presents a robust triangular-electrode based (TEB) capacitive detection method for MEMS gyroscopes. The TEB method utilizes the inherent nonlinearity of TEB variable-area sense capacitor to measure the amplitude and the phase of mechanical motion, and the derived amplitude and phase are independent of such system parameters as the carrier voltage, the nominal sense capacitance, the gain...
This paper reports a comparative study between double side-band (DSB) and single side-band (SSB) demodulation methods when applied to a general control system of MEMS gyroscopes. Theoretical analysis originally reveals the influence of phase delay variations of C/V sensing circuit in the drive loop on gyroscope output. A simulation is set up to evaluate the two demodulation algorithms, demonstrating...
Variable-area capacitor with tuning capability is used to control the drive mode of MEMS gyroscopes for constant-frequency oscillation. The proposed control approach tunes the drive axis natural frequency to a preselected frequency and regulates the amplitude of the drive axis vibration. The algorithm mainly implemented using a field-programmable-gate-array (FPGA) is tested on a MEMS gyroscope operating...
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