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In this paper, we propose a limited-view computer tomography(CT) image reconstruction method that reduces the scan times and X-ray dosages in the semiconductor industry. To reduce streak artifacts, which are caused by an insufficient number of views, we study the sinogram interpolation method based on the average pixel value. The change patterns are tracked by iteratively averaging the values. We...
In this paper, a limited-view computer tomography(CT) image reconstruction method was proposed to reduce the scan times and X-ray dose in the semiconductor industry. To reduce streak artifacts, which are caused by an insufficient number of views, we studied an adapted sinogram interpolation method based on the average pixel value. We used the characteristics of the neighboring views for an adapted...
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