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The 500keV Xe 2+ irradiation-induced anisotropic deformation of ordered colloidal silica nanoparticulate masks is followed using 2MeV 4 He + Rutherford Backscattering Spectrometry (RBS) with different measurement geometries and the improved data analysis capabilities of the RBS-MAST spectrum simulation code. The three-dimensional (3D) geometrical transformation from spherical...
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