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A novel approach of fabricating sub-10-μm patterns on silicon surfaces by electron beam (EB) lithography for attachment of oligonucleotides was described. The shape of the microfabricated arrays was observed to be regular by optical microscopy. An octadecyltrimethoxysilane (ODS) monolayer was deposited on the regions outside the patterned areas to minimize the nonspecific binding of biomolecules....
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