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A two-dimensional self-consistent fluid model combined with the full set of Maxwell equations is established to investigate the electromagnetic effects and the phase shift effect on the plasma characteristics in an Ar/CF4 capacitively coupled plasma at various discharge conditions. The results indicate that the plasma density evolves to a different distribution when the electromagnetic effects are...
Pulsed discharges in hydrogen and its isotopes play critical roles in several applications1, 2: pre-ionization plasmas in field reversed configuration, plasma lens for focusing heavy-ion beams, and gas-puff Z-pinches. However, the initial phase of these discharges is still poor understood.
Inductively coupled plasma (ICP) has been widely used in semiconductor industry, due to its perfect characteristics of reduced ion damage, independently controllable ion energy and high density plasmas.1, 2 In the actual industrial processes such as etching process, to control ion energy and plasma density, two independent RF power sources are conventionally applied to ICP, i.e., the power source...
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