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The optical properties of sputtered ZrN x films with 0.81=<x=<1.35 have been investigated and interpreted in terms of stoichiometry-related defects and crystal structure. The optical properties were determined by optical reflectivity, transmission and spectroscopic ellipsometry. As x increases from 0.81 to 1.35, the optical properties continuously change from metallic to semiconducting...
Cubic Pd 1-x In x and Pd 1-x Al x (0.4<x<0.56) intermetallic compound films have been deposited on oxidized silicon wafers by r.f. sputtering using either a multizone target or two independent targets. The actual composition was determined by electron-probe microanalysis. The characterizations by X-ray diffraction show that the films crystallize...
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