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The possibility of chemical state analysis with a wavelength-dispersive X-ray spectrometer system for particle-induced X-ray emission (WDX-PIXE) using a light ion microbeam is described. High-resolution Cu Lα 1,2 and Lβ 1 X-ray spectra from Cu, Cu 2 O and CuO targets are measured using this spectrometer system. The incident microbeam is focused 2.0 MeV protons with a beam size...
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