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Hydrogenated amorphous germanium carbon (a-GeC:H) alloy films have been prepared by magnetron sputtering of germanium in methane–neon gas mixtures. The dependence of structural, optical and electrical properties on the methane partial pressure (Rm) has been investigated. With increasing Rm, the concentration of hydrogen bonded to germanium and carbon, the optical band gap Eo, and the activation energy...
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