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The growth and characterization of a p–n heterojunction photodiode were studied. This photodiode was based on rutile TiO 2 nanorods (NRs) grown on p-type (111)-oriented silicon substrate seeded with a TiO 2 layer synthesized by radio-frequency (RF) reactive magnetron sputtering. Chemical bath deposition (CBD) was performed to grow rutile TiO 2 NRs on Si substrate. The structural...
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