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The key processes in an atmospheric‐pressure plasma jet containing Ar and tetraethyl orthosilicate (TEOS) are studied by means of two‐dimensional imaging of the important discharge radicals: OH, CH, and atomic O. The kinetics of the species generation is investigated by laser‐induced fluorescence spectroscopy. The work is focused on the behavior of the ground‐state radicals' density as a function...
In the present work, a polydiagnostic study of an atmospheric pressure plasma jet specifically designed for the deposition of coatings by using an Ar/tetraethyl orthosilicate (TEOS) mixture is undertaken. Both passive and active diagnostic methods are utilized to shed light on the complexity of gas‐phase mechanisms of precursor fragmentation. A detailed characterization is performed by (fast imaging)...
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