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Pt/SnO2 nanowires/SiC based metal-oxide-semiconductor (MOS) devices were fabricated and tested for their gas sensitivity towards hydrogen. Tin oxide (SnO2) nanowires were grown on SiC substrates by the vapour liquid solid growth process. The material properties of the SnO2 nanowires such as its formation and dimensions were analyzed using scanning electron microscopy (SEM). The current-voltage (I-V)...
Monitoring of air-quality it is a major task nowadays as the emission of pollutant gases increases particularly in urban areas. Ozone (O3) is a significant toxic pollutant and presents health risks. We have developed ozone sensors using a surface acoustic wave (SAW) based devices. The sensors structure consists of a lithium tantalate piezoelectric (LiTaO3) substrate with silicon nitride (SiNx) intermediate...
A two dimensional finite element model has been developed for the simulation of a layered flexural plate wave device using the ANSYS package. The simulated device consists of a 2.0 mum silicon nitride thin film, followed by a 0.4 mum aluminum ground layer. A 0.6 mum zinc oxide piezoelectric layer was defined to excite acoustic waves. Good agreement of device frequency response and displacement profiles...
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