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AlSiN coatings were prepared by the cathodic arc deposition method at a temperature of 400 °C and pressure of 2.6 Pa. The chemical composition, determined by SEM/EDS analysis, shows that the AlSiN coating presented here has a stoichiometry structure (Al40Si9N51). XPS and XRD analyses indicated AlN in both cubic and hexagonal modifications in the coating, and that the coating has a not fully completed...
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