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In this study, slab and ridge optical waveguides (OWGs) made of fluorinated polyimides were deposited on a quartz crystal microbalance (QCM), and hybrid sensors using OWG spectroscopy and the QCM technique were prepared. Polyvinyl alcohol (PVA) film with CoCl 2 was deposited on the OWGs, and the characteristics of humidity sensing were investigated. A prism coupler was used to enter a He–Ne...
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