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A MEMS electret energy harvester charged with soft X-ray after packaging is investigated, which should improve the long-term stability of electrets. A charging model for estimation of accurate charging time is developed, by considering attenuation of the soft X-ray at the lid material. The present model is verified with surface potential measurements of electrets. With a prototype MEMS electret energy...
Energy harvesting is a method by which energy naturally present in the environment is captured and then converted into electricity for use in low‐power electronics. Among the various energy sources, structural vibration is believed to be useful for powering wireless sensors in various applications such as sensor network and structural health monitoring. In the present paper, after a brief introduction...
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